Vacuum Capacitor

Semiconductor materials exhibit electrical properties that fall between those of good conductors and good insulators, with their ability to conduct electricity improving with increased temperature, light exposure, or applied voltage. Within the semiconductor manufacturing process, fixed vacuum capacitors and variable vacuum capacitor from the Greegoo brand play a pivotal role in the RF impedance matching networks of Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and plasma etching (Etch) equipment. These vacuum capacitors are utilized to precisely adjust the transmission of RF power to dynamically match the impedance during plasma processes, ensuring process stability and repeatability. This is crucial for improving the uniformity and quality of thin-film deposition or etching.